flyway planar motors. B&R is a shareholder in Planar Motors. flyway planar motors

 
B&R is a shareholder in Planar Motorsflyway planar motors  A planar motor solution consists of a collection of stators laid out in any pattern, and any number of movers, which can move freely across the stator surface

Welcome to Planar Motor, the global leader in planar motors. Based on the Lorentz force law. for a planar motor mover composed of four orthogonal Halbach arrays. XBot. To realize a long stroke and a large size mover, a stator was designed using a copper strip array. Watch Planar Motors in action and explore all of their features Planar Motor in Boydton, VA Expand search. Flyways (stators) are the muscle of every Planar Motor System. Similar to ubiquitous research and application of linear motor [1, 2], planar motor has attracted significant attention by researchers as it possesses excellent potential for high-precision systems []. Planar linear motors (Sawyer motors) have been used in industry as open-loop stepping motors, but their robustness and versatility has been limited. A planar motor system is composed of one or more movers (XBot) and stationary modular tiles (Flyway). Read the latest news about Planar Motor. This paper describes an electro-dynamic planar motor with moving coils, which levitates and propels itself over long x- and y-strokes under full control over six degrees of freedom (6. Each. et al. We are currently hiring for the following roles: Position. Planar Motor | 1. | Planar Motor Incorporated (PMI) is the global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems with unprecedented. Many other researchers have studied linear or planar motors by applying the 1D Halbach magnet array. Like other planar motor designs, Sawyer motors consist of. T. | Planar Motor Incorporated (PMI) is the global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems with unprecedented. Planar Motors: Nie dagewesene Flexibilität für Industrie 4. The XPlanar is a planar motor, which – like rotary motors – consists of multiple stationary, energized coils ( in the tiles) and mobile permanent magnets ( in the movers ). . 5 mm radius magnet sphere is excited by kicking" the vacuum chamber gently and observing the amplitude decay of the envelope. This sensor solution measures absolute position and is high bandwidth, multi-mover capable, and scalable with stroke. Abstract. A state-space model with a. D. Candela says the C-POD drive unit can run for 3,000 hours without service (compared to many outboard motors with internal combustion engines that require maintenance intervals of 100 hours). | Planar Motor Incorporated (PMI) is the global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems with unprecedented flexibility, precision, intelligence, re-configurability. 2. +1 (604) 484 0220. 3D CADモデル、BIMオブジェクト、2D DXFIn recent years, maglev planar motor have been developed as an alternative to xy-drives constructed of stacked linear motor in the semiconductor industry such as wafer stages. This thesis presents the development and verification of a multi-degree of freedom (DOF), non-contact position sensor for a magnetically levitated planar motor. Back SubmitReport this post Report Report. In order to simultaneously provide excellent tracking performance as well as good generalization for precision motion control of magnetically levitated (maglev) planar motors, this paper proposes. The release has 13 Advanced Motion components, including 11 XBot movers, a Flyway stator, and a. We are currently hiring for the following roles: Position. N1 - Proefschrift. In the semiconductor manufacturing process, various motors are being applied for automated processes and high product reliability. 1 Introduction. Her research interests include the design and control of planar motors, magnetic levitation system, and control theory and its applications. The rugged powder-coated steel “Clay Flyer Cart” is tough enough to carry all your gear out to the range and comes complete with a 60-Clay Auto Trap, Wobbler Kit, Wireless Remote, and the. High temperature superconductors (HTS) provide an alternative to Neodymium-Iron-Boron (NdFeB) magnets and copper coils currently usedCurrent densities of 100. With the rapid development of the Micro-Electro-Mechanical System (MEMS) and semiconductor industry, a magnetically levitated planar motor is becoming an optimal choice to meet the requirements of high speed, high precision, and high vacuum in lithography equipment and various microscopes [1,2,3]. Welcome to Planar Motor, the global leader in planar motors. The electro-dynamical motor principle is. Planar Motor in Moses Lake, WA Expand search. 2D Sketch. Abstract: Magnetically levitated planar motor is a new-generation motion device in modern precision industry, while its advanced motion controller design is still of main concern. Each XBOT is independently controlled and hovers over Flyways with 6 degrees-of-freedom motion capability. | Planar Motor Incorporated (PMI) is the global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems with unprecedented flexibility, precision, intelligence, re-configurability. PLANAR MOTOR INCORPORATED AND ANY REPRODUCTION IN PART OR AS A WHOLE WITHOUT THE WRITTEN PERMISSION OF PLANAR MOTOR INCORPORATED IS PROHIBITED. A Planar Motor System is composed of one or more movers (XBot) and stationary modular tiles (Flyway). 0 Transportsystem mit 6 Freiheitsgraden für Ihre ProduktionThe flexibility of allowing offsets between Flyways in both X and Y directions enables optimal layout of machines and manufacturing processes. . hygienic movers of 210mmX210mm and 330mmX330mm. Nowadays, our products are used in solar panel manufacturing, food and pharmaceutical product packaging. They create magnetic fields which levitate XBots in 6 degrees of freedom with their superior on-board controllers. About Us. 3 XY Stage Design. T. The system does not require any lubrication nor generate any contamination. Won-Jong Kim et al. 3–6 It can also work in the. Each XBOT is independently controlled and hovers over Flyways with 6 degrees-of-freedom motion. Compared with the. . 1. The flexibility of allowing offsets…Having seen what is Flyway and the dependencies needed to set up, let us see how to write the migration scripts using Flyway Let us create the following create table script in a file called V1. Magnetic field analysis of permanent magnet array for planar motor based on Equivalent Magnetic Charge method. During movements in the plane, the set of energized coils changes with the position of the translator. C. 2. The flexibility of allowing offsets…Planar Motors are smart robots that use magnetic forces for levitation and propulsion. It is the global leader in magnetically levitated planar motors, designing and producing smart conveying robot systems. | Planar Motor Incorporated (PMI) is the global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems with unprecedented flexibility, precision, intelligence, re-configurability. This paper proposes a novel permanent magnet planar motor with moving multi-layer orthogonal overlapping windings. PMI, founded in 2017 as a startup is based in Vancouver, Canada. Planar Motors are smart robots that use magnetic forces for levitation and propulsion. 2015 - dec. Each XBot is independently controlled and hovers over Flyways with 6 degrees-of-freedom motion capability. permanent magnet planar motors (IPMPMs), which have no cogging force [4] and no attraction force acting on the mover, are increasingly and widely developed. The Sawyer motor is one of the earliest inventions in this category [4]. Each XBot is independently controlled and hovers over Flyways with 6 degrees-of-freedom motion capability. It consists of a moving magnet array (the translator), and a stationary coil set (the stator). The primary member is composed of the torodial core and the armature. The global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems. Planar Motor. The use of moving-magnet planar actuators (MMPAs) is gaining popularity. Planar motor-based smart conveying systems are ideal for applications ranging from clean to harsh environments and is a disruptive technology transforming the manufacturing industry. 与其他类型电机一样,平面电机(Planar Motor)由定子. 3D Shape. IEEE Trans Ind Electron, 63 (9) (2016), p. Iet Electric Power Applications 2018 | Journal article DOI: 10. A planar motor system is composed of one or more movers (XBot) and stationary modular tiles (Flyway). Model 1, adapted directly from exist- ing literature on semi-analytical solutions for the magnetic fields of ideal solenoids, provides a highly. The global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems. The aim is to develop a predictive control algorithm having a simple design and implementation procedure on the one hand, and that can give satisfactory performance with a large class of nonlinear. Huang R, Feng J. Torque distribution control is a key technique for four-wheel independent-drive electric vehicles because it significantly affects vehicle stability and handling performance, especially under extreme driving conditions. 126,713 followers. A place to share and discuss state of art technologies and connect with like-minded engineers and…Planar motor-based smart conveying systems are ideal for applications ranging from clean to harsh environments and is a disruptive technology transforming the manufacturing industry. Planar Motor Layouts with Offset Flexibility Each Flyway (stator) is not necessarily located to align with its neighbors. The 1D Halbach magnet array with rectangular magnets is used and the magnetic field is. PMI’s intelligent shuttle technology has been integrated into B&R’s portfolio and has launched under the product name ACOPOS 6D. 8. August 2022, Frankfurt, Germany - Achema 2022. Planar Motor Layouts with Offset Flexibility Each Flyway (stator) is not necessarily located to align with its neighbors. To understand the working principle and the harmonic vibration behavior of the piezoelectric resonator, the trajectory of the friction contact was measured in free-oscillating mode at varying excitation. Flexible packaging evolutionThe planar motor was mathematically modeled and analyzed with respect to the main design parameters, after which the fine stage was optimally designed to be driven by high force. An XBOT is composed of one or more Movers and a stationary surface called Flyway made of modular Stators. Colorrobot, manufacturing, propulsion, electromagnetism | 7. Electro-mechanics. Planar motors are smart industry robots that use magnetic forces for levitation and propulsion with six degrees of freedom. T. Each XBot is independently controlled and suspended with the ability to operate 6 degrees-of-freedom. A planar motor system is composed of one or more movers (XB. In the semiconductor industry, positioning accuracy and acceleration are critical parameters. 製品. Therefore, maglev planar motor is with important application value and research significance in modern industry. Abstract. Design of permanent magnet flat linear motors for standstill applications. A Planar Motor system is composed of movable XBots (movers) and a stationary surface of modular Flyways (stators). They create magnetic fields which levitate XBots in 6 degrees of freedom with their superior on-board controllers. up of modular Flyways (stators). 2D Sketch. . Introduction. Expedition Upfitter. The global leader in planar motors. | Planar Motor Incorporated (PMI) is the global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems with unprecedented flexibility, precision, intelligence, re-configurability. Each. See which upcoming tradeshows we are attending and explore our previously attended tradeshows. The global leader in planar motors. The system can be considered a type of planar magnetic motor that maintains a single permanent magnet floating above a base composed of permanent magnets and electro- magnetic solenoids. Explore the main features of our products. Planar Motors are smart robots that use magnetic forces for levitation and propulsion. A significant stiffness improvement can be made by going from glass or. Contactless motion and fully solid-state. The most cost-effective diesel heaters on the. ColorPlanar Motors are smart robots that use magnetic forces for levitation and propulsion. A planar motor system is composed of one or more movers (XBot) and stationary modular tiles (Flyway). flyway. 1109/TIE. it/mj3mythb2ax71Each Flyway (stator) is not necessarily located to align with its neighbors. Integration neuer Produktionstechnologie von PMI ist ein Meilenstein für offene, adaptive Fertigung. The actuator has either moving coils and stationary magnets [1] or moving magnets and stationary coils [2]–[5]. Planar Motors are smart robots that use magnetic forces for levitation and propulsion. The global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems. Planar Motor Layouts with Offset Flexibility Each Flyway (stator) is not necessarily located to align with its neighbors. 1739×1231 49 KB. He is an inventor in 100+ patents. Planar motors are smart conveying robots that use magnetic forces for levitation and propulsion. A larger stroke 6D direct drive planar stage demonstrated 50 mm × 50 mm × 0. 通常由定子、转子和支撑部件等部分组成,在支撑部件的限制和电磁力的作用下,平面电机的动子能够带动负载产生两维的平面运动。. In Section 3, the integrated robust tracking controller which includes the accelerate FF term, PID FB. FAQ. The linear motor stages of the LMX1 series can be combined to form cross tables. This makes setting up and maintaining database schemas a breeze. Most planar motors can be classified into sawyer motor, in-duction planar motor, or synchronous PM planar motor (SPMPM) [6-8]. A planar motor system is composed of one or more movers (XBot) and stationary modular tiles (Flyway). The results show that the studied magnet arrays improve the acceleration of the planar motor compared to the benchmark magnet array with three cuboidal magnets per pole. It was a great success in last week's Automation Fair in Houston, TX. PDF. Date Issued. Area. 1. Canada. A planar motor system is composed of one or more movers (XBot) and stationary modular tiles (Flyway). Planar Motor Incorporated (PMI) is the global leader in magnetically levitated planar motors, designing and producing smart conveying robot systems with unprecedented flexibility, precision. This paper proposes a multiple switching control method for a long-stroke precision stage to improve its performance. The global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems. a linear motor capable of providing forces in both suspension and transla-tion without contact. The mechanisms in Fig. The load inertia — as seen at the motor shaft — goes down by the square of the pully ratio: a 5:1 pulley reduces the load inertia seen by the motor by a factor of 25 times. M. particularly in the form of planar motors utilizing a moving-magnet configuration, see [4]–[6]. Planar Motor’s Post Planar Motor 1,069 followers 4mo Report this post Report Report. This stage is the world’s first maglev stage that provides fine six-degree-of-freedom motion controls and realizes large (50 mm × 50 mm) planar motions with only a single magnetically levitated. Ability to link to our Snowflake account (and our clients if possible) Ability to design ERD. +49 (0) 7955 5829770. Planar motors are smart industry robots that use magnetic forces for levitation and propulsion with six degrees of freedom. 250-6651 Fraserwood Place. Features: Available with iron-core or coreless motors; Rigid aluminum frame with low profile; Simple assembly; Orthogonality ±5 arc-sec; Repeatability ±0. Abstract and Figures. 6 Reviews. The first planar motor with 6-degrees-of-freedom (DOF) motion can realise a limited planar motion of 50 mm×50 mm while the positioning noise is about 5 nm, which was designed andPlanar motor is used as an actuator to directly produce multi-degree long stroke, high speed, and high precision movement. By analysing the influence of coil thickness on the planar motor, Zhang et al. Lorentz Motor with Stationary Magnets and Coils Applied in a 6DOF Contactless Motion. Planar ac-tuators can be constructed in two ways. Turnkey Systems. Each Mover is independently controlled and. | Planar Motor Incorporated (PMI) is the global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems with unprecedented. 0. The following part of this paper is organised as follows. The flexibility of allowing offsets between Flyways in both X and Y directions…eCat Updates Este May 10, 2023, 6:12am 1 Today we have released new exciting components by Planar Motor Inc. We are a company of ambitious self-starters who enjoy working with robots. Three PCB 356A24 acceleration sensors were. In this tutorial, we’ll explore key concepts of Flyway and how we can use this framework to continuously remodel our application’s database schema reliably and easily. A Planar Motor System is composed of one or more XBots (movers) and a stationary surface made up of modular Flyways (stators). Planar Motor | 1,215 followers on LinkedIn. Damen P. Planar Motor Layouts with Offset Flexibility Each Flyway (stator) is not necessarily located to align with its neighbors. The flexibility of allowing offsets between Flyways in both X and Y directions enables optimal layout of machines and manufacturing processes. This paper describes an electro-dynamic planar motor with moving coils, which levitates and propels itself over long x- and. Planar Motors: Nie dagewesene Flexibilität für Industrie 4. The planar motor mover was supported by a sponge to ensure that the normal modal results were measured. The principle of operation is based on composition of the second longitudinal and fifth bending modes of the motor. 3966–3970. Flyway. The field analysis results obtained using scalar potential and Fourier series methods are confirmed with. More links. PMC. The goal of this paper is to analyze the multi-physical behavior of three moving-magnet planar. levitated planar actuators is that they can operate in vacuum, for example, in extreme-UV lithography equipment. The flexibility of allowing offsets…Wevolver. PY - 2020/4/30. Senior Hardware Engineer. PLANAR MOTOR INCORPORATED AND ANY REPRODUCTION IN PART OR AS A WHOLE WITHOUT THE WRITTEN PERMISSION OF PLANAR MOTOR INCORPORATED IS PROHIBITED. Each XBOT is independently controlled and hovers over Flyways with 6 degrees-of-freedom motion capability. Contact us for direct sales in North America, Europe and the World. The mover contains a halbach magnet array and the fixture part has characteristics of low weight and high structural bandwidth for fast. Planar Motor’s Post Planar Motor 1,217 followers 3mo Edited Report this post. [1] took the lead in developing a maglev planar motor containing four groups of linear motors, which caused the upsurge of planar motor research. The flexibility of allowing offsets. About Us - Planar Motor Our Board Alexander Slocum Director of Innovation, Co-founder Alexander Slocum is a member of US National Academy of Engineering, Pappalardo. A planar motor system is composed of one or more movers (XBot) and stationary modular tiles (Flyway). Flyway. Description. Figure 12. The Design News Gold Awards recognize companies and individuals that are not only reaching the pinnacle of achievement in their respective fields but are also pushing the envelope on what is possible within the industry as a whole. 8. Planar Motor | 1,073 followers on LinkedIn. M. com. Since this is a rigid body system, we include both the translational and rotational versions. Planar Motor | 2,028 followers on LinkedIn. The flexibility of allowing offsets…Freelance consultant. (PMI), a company with over 15 years of research and development experience in magnetic levitation technology for industrial manufacturing. PMC. Kim et al. The Lorenz force method has been. Planar Motor Inc. The global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems. In this study, a planar ultrasonic motor platform is presented that uses three half-side excited piezoelectric hemispherical shell resonators. 0605 WOSUID: WOS:000427928200016. 1 S3-A Flyway, 2 M3-06 XBots. Vandenput. This paper describes a short-stroke Lorentz-force-driven planar motor which can realize three-degree-of-freedom motions in high-precision positioning systems. Applications. A planar motor system is composed of one or more movers (XBot) and stationary modular tiles (Flyway). Precision motion systems are the core of a wide range of manufacturing equipment and scientific instruments, and their motion performance directly determines the quality and speed of the associated manufacturing or metrology processes. 3D Shape. A Novel Long Stroke Planar Magnetic Bearingactuator. . IEEE Control Systems Letters. 2D Sketch. Each Flyway (stator) is not necessarily located to align…Planar Motor | 1,070 followers on LinkedIn. These models can be used complementary to finite element analysis for. A planar motor system is composed of one or more movers (XBot) and stationary modular. Planar Motors are smart robots that use magnetic forces for levitation and propulsion. Planar Motor in Boydton, VA Expand search. The stepping mode provides high-resolution positioning capability for trajectory tracking application. Planar Motor | 1161 seguidores en LinkedIn. Installation Equipment for any of your projects. Flyway. ", keywords = "planar motor, magnetic. A planar motor solution consists of a collection of stators laid out in any pattern, and any number of movers, which can move freely across the stator surface. 3D Shape. 2023. 2 be the thrust forces exerted by the two motors on the frame. Explore the main features of our products. Each XBOT is independently controlled and hovers over Flyways with 6 degrees-of-freedom motion capability. It is an extended version of our previous publication. In this paper, we present a high-precision magnetic levitation (maglev) stage for photolithography in semiconductor manufacturing. Welcome to Planar Motor, the global leader in planar motors. Flyway; XBot; Downloads; FAQ; Videos. We will again start with Newton's Second Law. This makes design general in nature, applicable for single to multi-degree of freedom applications. This model kept much of what made the original Planar 3 great but added some serious upgrades, including a new plinth, arm and motor. Smeets, T. The global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems. The global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems. The coils are powered via cables, which have to move together. Unified wrench model of an ironless permanent magnet planar motor with 2D periodic magnetic field. Expand. In this paper, an overview of analytical techniques for the modeling of linear and planar permanent-magnet motors is given. These components can be simulated in a simple standalone mode or using the real hardware controller with the free addon: New Planar Motor Add-on for. A planar motor system is composed of one or more movers (XBOT) and stationary modular tiles (Flyway). In this paper, a permanent magnet array is proposed and the magnetic field distribution is obtained analytically by using magnetic scalar potential. The dynamic model of the ultra-precision positioning dual stage is shown in Figure 6. Abstract. About. P. | Planar Motor Incorporated (PMI) is the global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems with unprecedented. The external excitation was imposed by an impact hammer (PCB 086C01) with a hard trigger head, and a roving hammer strategy was employed to obtain vibrational behaviors of different nodes. Planar Motors are smart robots that use magnetic forces for levitation and propulsion. Planar Motor are smart robots that use magnetic forces for levitation and propulsion. Planar Motor | 1,134 followers on LinkedIn. Using a sensor integrated into such a motor, a. Distribution of magnetic poles in two. In this article, a min-max model predictive control (MPC) method of planar motors is proposed for the first time to achieve robust precision position tracking, which has a low computational burden and strong capability to deal with the problems of stability, robustness, optimization, and input constraints. We designed a novel surface motor stage supported by air bearings and driven by linear electromagnetic motors. In this work, an efficient constrained nonlinear predictive control algorithm, based on the meta-heuristic optimization strategy, is proposed. This paper describes a novel commutation strategy for planar actuators with moving magnets and integrated magnetic bearing. This motor is a viable alternative to the state-of-the-art motion systems, and therefore overactuation can be of vital importance towards achieving nanometer positioning accuracy. The algorithm decouples the force and torque components directly and…. To deal with the problem, an improved method based on spatial magnetic detection is proposed for planar 3-degree-of-freedom position measurement with large ranges in this. Planar Motor Layouts with Offset Flexibility Each Flyway (stator) is not necessarily located to align with its neighbors. Here, an extended unified wrench model (EUWM) of IPMPM is proposed through a systematic extension of previously proposed unified. The moving element is a planar plate made of aluminum alloy with dimensions of 378 mm length, 393 mm width and 25 mm height, and weight of 24. Engineering. Back. Each XBOT is independently controlled and hovers over Flyways with 6 degrees-of-freedom motion capability. PMI stärkt Angebot der Division Maschinenautomatisierung B&R von ABB. The planar motor (like the sawyer motor) has a cog-ging force, so it is difficult to produce a smooth and continu-ous driving force [6]. 00. Planar motor-based smart conveying systems are ideal for applications ranging from clean to harsh environments and is a disruptive technology transforming the manufacturing industry. Each XBot is independently controlled. selling diesel air heaters, engine coolant heaters, heating system installation equipment through our dealer network and directly to customers across. At Planar Motor we work with cutting edge technologies to find innovative solutions for our products and customers. The orthogonal multi-layer construction guarantees a. However, these motors suffer from short-comings. The global leader in planar motors. com: Planar Motor Layouts with Offset Flexibility Each Flyway (stator) is not necessarily located to align with. Planar motor-based smart conveying systems are ideal for applications ranging from clean to harsh environments and is a disruptive technology transforming the manufacturing industry. Sep 26, 2019. High-precision planar magnetic levitator Figure 2 is a photograph of a prototype magnetic levitation stage designed and implemented by the authors. The system does not require any lubrication nor generate any contamination. Abstract. The ironless permanent magnet (PM) planar motor (IPMPM) has great potential to realise multi-degree of freedom (DoF) motion. Superconductors could provide an improvement in magnetic flux density and/or current density compared to the permanent magnets and copper coils currently. As a result, the force ripples caused by the higher harmonics can be basically eliminated with a. May 2022, New York, USA - Interphex 2022 Flyways (stators) are the muscle of every Planar Motor System. The flexibility of allowing offsets…The planar motor has received wider and wider attention in the academic field and in the industrial field because of the broad prospect of its application in the planar 2-D positioning device. The global leader in magnetically levitated planar motors, designing and manufacturing smart conveying robot systems. IEEE Transactions on Industrial Electronics 2022-12 | Journal article DOI: 10. Careers. 2021. The movers are magnetically levitated, offer 6. 250-6651 Fraserwood Place. Image by Abigor, license CC-BY 2. W. introduced a more appropriate analytical approach to determine the coil thickness dimension directly. Report this post Report Report. In order to improve the fault tolerance and. XPlanar enables new degrees of freedom in product handling: Levitating XPlanar movers float over individually arranged XPlanar tiles on freely programmable t. The flexibility of allowing offsets…Planar Motor | 1161 seguidores en LinkedIn. Planar Motor | 1,137 followers on LinkedIn. 4-kilogram payload. Planar Motors are smart robots that use magnetic forces for levitation and propulsion. Planar Motor. We designed a maglev stage with the following design concepts to. IEEE, pp. Pan, J. Privacy & Cookie Policy Planar Motor | 1,136 followers on LinkedIn. 2008. 1071–1076. I. The demand for high-precision and high-throughput motion control systems has increased significantly in recent years.